Title

Least-squares finite element formulation for hydrodynamic modeling of semiconductor devices

Document Type

Article

Publication Date

2-16-2001

Department

Mechanical Engineering

Abstract

A least-squares finite element formulation is presented for the hydrodynamic modeling of semiconductor devices. The formulation results in a symmetric and positive definite algebraic system. Its capability of adopting equal-order interpolations for all unknown variables makes it simple to formulate and easy to program. The semiconductor hydrodynamic equations coupled with the Poisson equation are formulated as one unified equation system in this least-squares finite element scheme. The developed method is examined on 1-D and 2-D deep-submicron semiconductor device structures to demonstrate its capability of handling the large gradients of variables and highly nonlinear source terms in the semiconductor hydrodynamic equations. © 2001 Elsevier Science B.V. All rights reserved.

DOI

10.1016/S0045-7825(00)00350-9

First Page

2875

Last Page

2891

Publication Title

Computer Methods in Applied Mechanics and Engineering

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